Slurry blending and delivery systems, are the market leading process systems for demanding applications. Allowing our customers to configure and slurry chemical systems according to their individual process and factory requirements. The systems are designed to accurately blend and deliver CMP and Polishing slurries to the point of consumption from any type of source container with full redundancy, and metrology if required. The modular configuration allows for standardisation in the control but the ability and reconfigure should their process or volume demand change through the product lifecycle. Modules can be located in any configuration to accommodate various space and facility constraints.
Our systems offer:
- Configurable range for all purity, all consumptions and all budgets
- Modular concept that can be adapted to our customers’ needs
- High reliability
- Integrated metrology options
- Ease of maintenance
CT | CONTROL
CT | CONTROL Module is the centralised unit for the electrical components and control logic of the overall system with user interface to optimise the entire process through, enhanced safety, increased uptime and ensuring flow stability.
The module build utilises off the shelf components, industrial PLC and HMI control. Customer P&ID is clearly displayed with user friendly input and output screens, fluid path flow, recipe selection and alarm logging. The system can collect Key Input Process Variables that allows engineers to have full visibility of their process.
The Control module can be configured to the left or right side of the overall slurry blending and delivery system depending on location and user needs.
CT | DELIVERY MODULES
CT | DELIVERY Modules allow for the automatic delivery of slurries from different sized drums or totes based on defined application to either integrated blend or day tank modules or directly to the point-of-use (POU) via controlled pumping.
The design philosophy aims to achieve high uptime and reliability through the use of multiple back-up modes, and the various modular layouts with easy interchangeability allowing the end user to swap format easily without having to replace the complete system.
A truly flexible system that can meet your changing production needs. Pre-mix sequences and the Variable Speed InDrum mixing technology offer superior mixing and blending processing performance for slurry applications.
CT | BLEND MODULES
CT | BLEND Modules provide medium to large slurry blending capability suitable for a wide range of CMP Slurries such as Tungsten, Gold and Silicon Carbide. The blend is accurately measured with the use of weight-based methodology, the blend tank is mounted on a load cell and the constituents are added sequentially as required. A low shear maglev pump is used to homogenise the mix, that can be validated by various metrology options.
CT | TANK MODULES
CT | DAY TANK Modules offer multiple capacity and redundancy options that pair with the blending and delivery systems to provide continuous flow and pressure to the various processing systems within the fab.
CT | PROCESS CONTROL, METROLOGY & SAFETY
CT | PCMS is a range of additional components that can be added to a new or existing system to improve the control, measurement and safety to ensure accuracy and reliability of the slurry blend and system operation. These can range from redundant pumps, filtration, density meter, humidified N2 and KPIV publishing.
Slurry Delivery & Collection Brochure
