Chemical Blending
& Delivery Solutions

 

The FAST CHEMTECH solvent systems are meticulously designed with safety in mind due to the flammable and combustible nature of the liquid chemical. The system is engineered to comply with applicable international design codes and standards, namely ATEX, by performing ignition and hazard analysis as well as risk assessments during the design and development stage, to ensure that the system performs safe handling and distribution of ultra-pure solvents, from drums or totes to points of use across a fab-wide distribution loop using advanced pumping technology. The system is designed with stainless steel enclosures and wetted materials that are entirely conductive and grounded to prevent ignition from occurring. The implementation of innovative and inclusive design guarantees engineering for safety —streamlining operations in facilities.

The systems can incorporate heated jackets with pre-mix recipes to help manage solvents with a high freezing point like DMSO.

Our systems offer:

• A configurable range (for all purity grades, all consumptions and all budgets)
• A modular concept that can be adapted to our customer needs
• High reliability
• Integrated metrology options
• Easy maintenance (user-friendly software, settings, etc.)
• Over 20 years’ experience

CT | CONTROL

The CT | CONTROL Modules incorporate a centralized means to corral the electrical and control components for the CT Modular series helping optimize the entire process, enhance safety, increase uptime and ensure blend and delivery stability.

It uses standard off the shelf components and an industrial PLC and HMI control displaying the system PI&D status, with user friendly input and output screens, recipe selection, along with alarm logging etc. The system can collect Key Input Process Variables that allows engineers to have full visibility of their process.

CT | DELIVERY MODULES

The CT | Delivery Modules allow the automatic distribution of ultrapure chemical acids and bases, from totes and drums to the Points-of-Use (POU), or to the blending and day tank modules using controlled pumping. The design philosophy aims to achieve high uptime and reliability through the use of multiple back-up modes, and the various modular layouts with easy interchangeability allowing the end user to swap format easily without having to replace the complete system. A truly flexible system that can meet your changing production needs.

CT | BLEND MODULES

The various CT | Blend Modules provide a medium to large volume chemical blending capability suitable for standard applications such as TMAH (TetraMethylAmmonium Hydroxide), HF (Hydrogen Fluoride) or NH4OH (Ammonia Solution) dilution etc. The system uses weight-based methodology blending. The blend tank is mounted on a scale and the constituents are added sequentially as required. A low shear maglev pump is used to homogenize the mix, that can be validated by various metrology options.

Inline blending modular options can also offer a cost-effective option for low-medium volume post CMP chemistries etc.

CT | TANK MODULES

FAST CHEMTECH CT | TANK solutions offer multiple capacity and redundancy options that pair with the blending and delivery systems to provide continuous flow and pressure to the various processing systems within
the fab.

CT | VALVE MANIFOLD BOX 

The CT VMB offers various standardised 4, 6, 8, 10 etc stick configurations installed in the supply loop of Delivery, Blend or Tanks Modules. The system features optimized layout and piping design to minimize equipment footprint and promote ease of installation, service and maintenance. The system is designed to have a large and clear PVC door for enhanced visibility and accessibility as well as a built-in leak sensor with remote communications to detect leaks inside the cabinet etc.

Chemical Blending & Delivery Brochure

Slurry Blending & Delivery

Solvent Delivery & Collection Solutions

CHEMTECH Custom Projects

Equipment Options

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