Solvent delivery and collection systems, are meticulously designed with safety in mind, engineered to comply with applicable international design codes and standards, namely ATEX. The system is designed to collect solvent wastes from wafer production floors via gravitational flow into stainless steel drums or tanks and safe handling and distribution of ultra-pure solvents, from drums or totes to points of use across a fab-wide distribution loop using advanced pumping technology. The system is designed with stainless steel enclosures and wetted materials that are entirely conductive and grounded to prevent ignition from occurring. The implementation of innovative and inclusive design guarantees engineering for safety, streamlining operations in facilities.
Our systems offer:
- Configurable range for all purity, all consumptions and all budgets
- Modular concept that can be adapted to our customers’ needs
- High reliability
- Integrated metrology options
- Ease of maintenance
CT | CONTROL
The CT | CONTROL-S Module is the centralised unit for the electrical components and control logic of the overall system with user interface to optimise the entire process through, enhanced safety, increased uptime and ensuring flow stability.
The module build utilises off the shelf components, industrial PLC and HMI control. Customer P&ID is clearly displayed with user friendly input and output screens, fluid path flow, recipe selection along with alarm logging.
System can collect Key Input Process Variables that allows engineers to have full visibility of their process.
CT | DELIVERY MODULES
CT | DELIVERY-S Modules allow for the automatic delivery of ultra-pure solvents from different sized drums or totes based on defined application directly to the point-of-use (POU) via controlled pumping. The design philosophy aims to achieve high uptime and reliability through the use of multiple back-up modes, and the various modular layouts with easy interchangeability allowing the end user to swap format easily without having to replace the complete system. A truly flexible system that can meet your changing production needs.
CT | DELIVERY & COLLECTION MODULES
Delivery & Collection modules allow for the automated waste collection from processing systems, or pressure and flow controlled distribution of ultra-pure solvents to ensure stable processing.
Collected waste can be pumped to totes or drums for waste recovery and recycling.
CT | VALVE MANIFOLD BOX
The CT | Valve Manifold Box offers various standardised 4, 6, 8 and 10 stick configurations installed in the supply or return loop of Delivery & Collection Modules. The system features optimised layout and piping design to minimise equipment footprint and promote ease of installation, service and maintenance.
The system is designed to have a large enclosed door for enhanced safety and accessibility, as well as a built-in leak sensor with remote communications to detect leaks inside the cabinet.
VMB is user configurable depending on requirement for solvent or supply and return.
CT | PROCESS CONTROL, METROLOGY & SAFETY
CT | PCMS is a range of additional components that can be added to a new or existing system to improve the control, measurement and safety to ensure accuracy and reliability of the solvent collection and system operation. These can range from redundant pumps, fire suppression, inline solvent heater and KPIV publishing.
Solvent Delivery & Collection Brochure
